Used TEL / TOKYO ELECTRON Indy-B-L #293643318 for sale

TEL / TOKYO ELECTRON Indy-B-L is an advanced etching and ashing equipment designed for applications in the field of semiconductor manufacturing. TEL INDY B L is specifically designed to be a high performance and highly versatile platform, allowing users to achieve both high throughput and high flexibility. TOKYO ELECTRON INDY B-L consists of a horizontally-mounted platform containing a full suite of components, including an away-turret, an ashing module, three independent Oxygen, CF4, and C3F8 sources, two independent substrates sources, two independent side-broads, and a single temperature chamber. In addition, TEL / TOKYO ELECTRON INDY B L also includes a RF power generator and optional floating substrate chuck, allowing users to customize the system for their specific process needs. TEL / TOKYO ELECTRON INDY B-L utilizes a digital oscillator design, which allows for precise frequency control and fast digital tuning. The use of the away-turret provides a faster and more efficient machine setup for each process, optimizing the user's process performance. The quality of the etching process can be further improved by leveraging the independent Oxygen, CF4, and C3F8 sources, as well as the dual independent substrate sources. The dual substrate sources of TEL Indy-B-L allow for both low-k and high-k materials to be processed with the same unit, eliminating the need for a dedicated etcher for each substrate type. The quality and performance of the etching process can also be further improved by leveraging the advanced temperature control and RF generator. The temperature chamber of TOKYO ELECTRON Indy-B-L is vacuum-sealed and has an advanced plasma temperature control machine, allowing for precise temperature management with a wide range of process applications. The integrated high-power RF generator of INDY B-L is designed to allow for precise frequency control and fast digital tuning, significantly improving the user's ability to control the plasma parameters of the etching process. In conclusion, TEL INDY B-L is an advanced etching and ashing tool designed for applications in the field of semiconductor manufacturing. INDY B L is specifically designed to be a high performance and highly versatile platform, allowing users to achieve both high throughput and high flexibility. The expansive suite of components, combined with the digital oscillator design, advanced temperature control, and RF power generator make Indy-B-L an ideal etching and ashing asset for both low-k and high-k materials.