Used TEL / TOKYO ELECTRON Indy-B-L #293643320 for sale

TEL / TOKYO ELECTRON Indy-B-L is an etcher / asher that is designed to handle a variety of surface treatment processes needed in a wide range of semiconductor manufacturing. This high-spec etcher / asher boasts a number of features that ensure faster processing speeds and higher accuracy. With its unique peripheral containment equipment, it helps minimize process debris, helping to reduce downtime due to clogged etching nozzles or other process-related issues. This helps users achieve higher yields with levels of reliability that have not been seen before. It adopts a low-pressure plasma system that eliminates degassing time and achieves higher etch rate. It also supports dry etch, dry strip, and wet strip in a wide range of process gases and is compatible with halide-based etch and plasma strip processes. The etcher / asher has a temperature-controlled substrate holder that ensures uniform conditions for etching. This helps prevent thermal shock and improves process stability. It also features a high-precision transfer arm that reduces the amount of unit down-time, allowing it to accurately pick substrates up and down while maintaining safe process conditions and shortening substrate loading / unloading time. TEL INDY B L also features an RF-driven, flat-panel plasma radio frequency control machine that helps ensure concentricity and uniformity in all etch processes. This helps reduce processing time and substrate distortion. Finally, this etcher / asher is equipped with a high-performance cleaning tool and quality assurance asset to ensure processed substrates meet the highest standards. The model's electronic control equipment ensures total process reproducibility, making it the ideal tool for ensuring high quality processing for the most demanding semiconductor applications.