Used TEL / TOKYO ELECTRON Indy-B-L #293643336 for sale

TEL / TOKYO ELECTRON Indy-B-L (Induction Etcher/Asher) is a high-precision vacuum-process machine developed by TEL specifically for semiconductor fabrication. This etcher/asher is designed for the purpose of achieving vertical etch results with excellent process uniformity, low particle generation, and high precision etching. TEL INDY B L facilitates deep etching of extremely small scale structures and provides excellent profile control for high aspect ratio structures. TOKYO ELECTRON INDY B-L offers three types of etching: Anisotropic Induction Etching (AIE), Isotropic Induction Etching (IIE), and Tetrahedral Etching (TE). AIE provides highly directional (highly anisotropic) etches that are well suited for forming steep sidewall features while IIE and TE can be used to create gently sloped profiles. In addition, the TE process can be adjusted to provide precise etch control in order to fabricate precise three dimensional structures with very precise etching precision. TEL Indy-B-L is equipped with a multi-chamber environment and is capable of performing both etching and ashing processes on the same machine. The etching chamber utilizes a low pressure microwave powered inductive coil and is designed to prevent accidental ionization of material during processing. The ashing chamber uses a reactive gas to facilitate faster etching uniformity and higher throughputs. INDY B L also features an advanced etching/processing control equipment which utilizes a GUI-based user interface that is coupled to a proprietary industrial-grade computer system. This unit enables precise and accurate control of etching results through the intuitive menu-driven environment. The machine also offers a variety of diagnostics, process history logging, data transfer, and settings templates for highly efficient and reliable etching/processing of high quality results. In summary, TEL / TOKYO ELECTRON INDY B-L is an advanced etching/ashing tool designed for the most demanding semiconductor processes. The machine provides excellent etch uniformity, particle control, and profile control, and is backed by a powerful control asset. INDY B-L is uniquely equipped to accurately and precisely etch small scale structures, and can be used for a wide range of different etching and processing purposes.