Used TEL / TOKYO ELECTRON Indy-B-L #293809898 for sale
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ID: 293809898
Wafer Size: 12"
Vintage: 2007
Vertical furnace, 12"
Process: D-Poly
Hard Disk Drive (HDD)
2007 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an etcher / asher designed for the fabrication of semiconductor and integrated circuit devices. It is a highly versatile, integrated, rapid-response equipment, ideal for a wide range of applications such as shallow trench isolation (STI), high aspect ratio metal etching, shallow trench metal stripe and shallow trench isolation (STI) and deep trench isolation (DTI). TEL INDY B L utilizes the latest state-of-the-art technologies in semiconductor fabrication. It features TEL proprietary Cleanliness Control System (CST) for controlled etched films resulting in fewer defects, and a Robust Sample Transfer unit (RST) with an innovative sample transportation concept which enables high-throughput process. TOKYO ELECTRON INDY B-L can accommodate different source materials, and its Etch and Asher sections provide a wide range of flexibility and accuracy. INDY B L can be used to etch shallow trench metal stripe for buried contact devices and pattern wires, shallow trench isolation for contact and interlevel metalization and deep trench isolation for device isolation. The etching process is highly customizable, with selectable etching times, temperatures, pressures, and gas flow rates. It also includes programmable plasma control functions, for efficient processing of different films. In its Asher section, TEL INDY B-L features an integrated cooling machine and variable-area nozzle for uniform distribution of reactants along the wafer surface, and an integrated flood gun which deposits a uniform film on the wafer's surface to prevent redeposition. The Asher section also features a touch-screen interface which allows for easy set-up and operation of the etching & ashing processes. In conclusion, TEL Indy-B-L etcher / asher is an integrated, high-performance tool designed for the fabrication of semiconductor and integrated circuit devices. It features a range of advanced technologies for controlled etched films and a user-friendly interface for simple set-up and operation. Its highly customizable etching and ashing processes make it ideal for a variety of applications in semiconductor fabrication.
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