Used TEL / TOKYO ELECTRON Indy-B-L #293810872 for sale

TEL / TOKYO ELECTRON Indy-B-L is a high-precision etcher or asher for semiconductor device fabrication. This wet-etch process tool promises ultra-precise etching of dielectric and metal films on any semiconductor wafer. It is able to etch up to 0.375 μm thick films with a dependable profile precision of ± 0.2 μm. TEL INDY B L has a high processing accuracy and efficient operation for a large number of recipes. The etch process is mostly interactive and guided by the process control software. Its chamber is internally designed to sharply and uniformly reduce the pressure for consistent pressure etching. In addition, the chamber incorporates a gas-circulated heat exchanger to ensure stable temperatures. TOKYO ELECTRON INDY B-L boasts wafer temperature uniformity of less than ±2°C and also features two observation ports for in-situ monitoring of etching results. The wafer rotation speed can range between 500 rpm and 5,000 rpm to further ensure accurate etching. The front-side source contains an amplifier that produces a high-frequency voltage to induce variation in etch chemistry for precise etch control. The source also features an auto tune function, which allows it to automatically optimize the source parameters based on the material being etched and the etching conditions. TEL Indy-B-L's special safety features include an emergency vent valve, integrated drip pans, and built- in acid collection and neutralization systems. Overall, it provides an extremely reliable, cost-efficient, and accurate etching process for the fabrication of semiconductor devices.