Used TEL / TOKYO ELECTRON Indy-B-L #293825595 for sale

ID: 293825595
Wafer Size: 12"
Vintage: 2007
Furnace, 12" Process: TEOS 2007 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an etcher/asher designed to be used for a wide range of etching and ashing processes. It is an etcher/asher that can be used for both laboratory and production applications. The device is comprised of a controller, a gas cabinet, an etch chamber, and a clamp. The gas cabinet contains the gases that will be used in the etching and ashing processes, and is connected to the chamber through the clamp. The controller houses the digital and analog input/output circuits and contains parameters that can be adjusted for the etching and ashing process. The parameters of the temperature, pressure, and other conditions can be adjusted to create a precise etchal or ash for a particular application. In the etch chamber, both a wet etch and an ashing process can be used. For a wet etch, wet chemicals are used to create an etch on the surface of a metal or semiconductor material. The chemicals used in the wet etching process are typically hydrogen halides, such as hydrochloric acid and hydrofluoric acid. In the ashing process, a dry etch process uses physical and electrical erosion to etch the surface of a material. The dry etch process uses a fluorocarbon gas, such as CF2, and an oxygen-rich plasma. TEL INDY B L has multiple functionalities. The device can be used to etch single or multiple layers on a single substrate. It also has the capability to perform etching with different pulse conditions. The device has built-in fixtures and movable support frames for multilayer etching. It also includes a continuous monitoring system for etch depth and endpoint. Additionally, multiple etch chamber sizes are available, allowing for large area processing and flexible etch rates. Finally, TOKYO ELECTRON INDY B-L has numerous safety features. These include multiple levels of lockout control, automatic purging of etchants before and after process, and an external interlock system. All of these features make TEL / TOKYO ELECTRON INDY B L a reliable and safe etching and ashing system.
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