Used TEL / TOKYO ELECTRON Indy-B-L #9140988 for sale

TEL / TOKYO ELECTRON Indy-B-L
ID: 9140988
Wafer Size: 12"
Vintage: 2006
Furnaces, 12" 2006 vintage.
TEL / TOKYO ELECTRON Indy-B-L is a fully automated etcher and asher that utilizes the latest in state-of-the-art technology to deliver precise semiconductor processing results. Unlike traditional manual etching methods, TEL INDY B L has advanced control systems that enable precise adjustment of the temperature, chemical concentration, airflow, and other parameters to ensure clean, high-quality etching. With its efficient wafer cleansing and etching capabilities, TOKYO ELECTRON INDY B-L is perfect for processing the most advanced semiconductor substrates for a wide range of applications. TEL Indy-B-L features an on-board process cabinet which is utilized for the etching process. This cabinet is equipped with a gas coordination knob for setting the exact pressure, temperature, concentration and flow rates needed to achieve clean, high-quality results. The integrated vacuum pump provides efficient evacuation of the gaseous chemicals from the etching process chamber. A laser interferometer is used to measure the wafer's thickness and adjust the gas parameters accordingly, enabling maximum surface precision. To ensure precise etching results, TEL / TOKYO ELECTRON INDY B-L is outfitted with two heating elements that provide completely even and consistent heating throughout the etching process. For maximum uniformity, the upper heating element has precisely-defined air gaps that help maintain the desired temperature even across the full wafer surface area. INDY B L also features an intelligent heat monitor equipment that monitors heating changes in intricate detail. To maintain a safe environment, TEL INDY B-L includes a high-performance dry gas purification system that efficiently removes airborne impurities, allowing for safe and clean etching. A double-sealed door prevents the escape of any harmful gaseous chemicals while ensuring maximum safety and cleanliness. Additionally, an exhaust safety device detects any rapid pressure rise, providing immediate relief to protect the unit from potential harm. INDY B-L runs off a high-performance, multi-layered CPU computing machine with powerful numerical control tool and data analysis capabilities. It links into a user-friendly display, allowing for convenient parameter editing, live monitoring, and full control over all the etching and ashing processes. The asset is also equipped with a fail-safe auto shutdown protocol, ensuring that the machine will automatically shut down if any irregularities are detected. With its combination of sophisticated control systems and advanced purging technologies, TOKYO ELECTRON INDY B L is a prime choice for users looking for precision and dependability in semiconductor etching and ashing processes.
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