Used TEL / TOKYO ELECTRON Indy-B-L #9235796 for sale

TEL / TOKYO ELECTRON Indy-B-L is an etcher, also known as an asher, used for microelectronic fabrication. It is an advanced etching equipment that is capable of producing high quality device structures with precise geometries. It features a high throughput capability for processing thin or thick substrates with a wide range of process chemistries. TEL INDY B L is equipped with a chemical vapor deposition (CVD) chamber, enabling the etching of oxides and nitrides with accuracy and precision. The system is designed for a wide variety of substrates such as thin foils, silicon wafers, and rigid panels. TOKYO ELECTRON INDY B-L features an advanced user interface with an intuitive seven-inch LCD touch screen, allowing users to quickly and easily enter process recipes. Furthermore, the unit has a highly reliable track machine that ensures accurate wafer transfer. TEL / TOKYO ELECTRON INDY B L is suitable for etching applications such as chemical mechanical polishing (CMP), shallow trench isolation (STI), and metal gate etching. The tool can process vias and trenches of different widths and depths as well as etched line widths as small as 0.2 microns. Moreover, TEL INDY B-L incorporates high-performance plasmas generated through an RF ICP (Inductively Coupled Plasma) source with outputs ranging from 100 W to 1.2 kW. Furthermore, INDY B L features a multi-zone asset designed to help process different materials in different zones while utilizing optimized process parameters. It also comes with a four-chamber processing model for dual-chamber batch etching. The equipment boasts an optimized gas supply and delivery system, which enables rapid exhaust of process chemistries, resulting in shorter processing times. TOKYO ELECTRON Indy-B-L features a range of safety features for operator and production assurance. It is equipped with a range of monitors and sensors such as pressure, temperature, flow, and mask temperature monitors, as well as a chamber pressure monitor, to ensure process stability. Furthermore, TEL / TOKYO ELECTRON INDY B-L is equipped with a dedicated ESD (Electro Static Discharge) unit which protects circuits from ESD-induced damage. In conclusion, TEL Indy-B-L is a highly advanced etching machine with an excellent user interface, wide substrate compatibility, variable plasma outputs, and robust safety features. It is ideal for microelectronic etching applications such as CMP, STI, and metal gate etching, and can produce precise device structures with accuracies down to 0.2 microns.