Used TEL / TOKYO ELECTRON Indy-B-L #9270215 for sale

TEL / TOKYO ELECTRON Indy-B-L is an etcher/asher designed for use in advanced semiconductor processing. It is capable of precision etching and exposing photoresist on wafers up to 8-inch in diameter. TEL INDY B L uses a high purity, cold process, plasma etching process with a low-pressure vaporized etching process to produce high resolution patterns in advanced semiconductor materials. The etchingly process of TOKYO ELECTRON INDY B-L utilizes a proprietary high pressure etching process that is self-contained and results in minimal contamination. The etcher uses advanced injection systems for high-purity etching gases and reaction gases, in order to maintain low plasma pressure and high quality etching processes. TEL INDY B-L utilizes advanced gas injection systems to control plasma parameters and to ensure a highly homogeneous plasma distribution and to prevent reaction-product buildup. This equipment also allows for etching recipes to be precisely controlled and tuned for a range of wafer structures and materials. TEL / TOKYO ELECTRON INDY B-L is highly versatile and can process a variety of materials such as silicides, nitrides, oxides and carbides. It also has a broad range of configurable etching chamber sizes and substrates for multiple types of wafers. It is also capable of etching complex structures such as vias, contacts, lines and trenches in any shape and depth. The machine can also handle high aspect ratio structures such as gate oxide layers. INDY B-L also offers a number of different control options such as Load Lock devices for controlling wafer loading and unloading, and a Wafer Baffle System for directing the plasma flow. It also includes a CHCV Control Unit that automatically sets the chamber pressure and etch rates, and a Roll-Out Chamber Door for easy access to replace parts. The etcher has a real time temperature control machine that can be used to monitor wafer temperatures and to ensure optimal etching conditions. TEL / TOKYO ELECTRON INDY B L is an advanced etcher/asher designed to deliver excellent etching results and precise pattern formation. INDY B L is capable of etching delicate and complex structures with high resolution and low contamination. With its versatile feature set and automated controls, TOKYO ELECTRON INDY B L is an ideal choice for any advanced semiconductor processing needs.