Used TEL / TOKYO ELECTRON Indy-B-L #9394500 for sale

TEL / TOKYO ELECTRON Indy-B-L
ID: 9394500
Wafer Size: 12"
Vintage: 2007
Furnace, 12" Plasma Assisted Process (PAC) Module Gases: N2O NH3 SiH2Cl2 SiH4 2007 vintage.
TEL / TOKYO ELECTRON Indy-B-L is a powerful and precise wet etch/asher. This device is a semi-batch wet etching equipment designed for precise control over etching times and solutions. It is a fully automated machine that allows precise chemical solutions and precise control over parameters like etching speed and etch rate. With automated adaptation of the parameters, TEL INDY B L can provide precise etching results to micron level accuracy. It is ideal for surface engineering applications like wafer processing, substrate cleaning, as well as photomask abrasion. TOKYO ELECTRON INDY B-L is fully automated and requires minimal user interaction. It is equipped with a top-down vision inspection system that provides precision and accuracy during the etching process. This unit also allows the user to etch a certain area and generate a preview of the end results, before performing the actual etching. TEL / TOKYO ELECTRON INDY B-L can be configured with a range of etching solutions, such as hydrofluorocarbons, detergent solutions, and highly evaporative solutions. The machine also enables users to choose between high-temperature, low-temperature, and extended-temperature etching. TEL Indy-B-L is equipped with a two-chamber tool that allows for multistage etching. This means that the user can etch different substrates with the same set of parameters, and allows them to run different etching technology from the first chamber to the second one. The asset is also designed with a wide variety of etch ports, ranging from small to large, and thin to thick substrates. The built-in safety features of TOKYO ELECTRON INDY B L make it an ideal choice for wet etching of sensitive wafers and substrates. It includes pressure sensors, temperature sensors, and level sensors to protect the tools and the users. In addition, it has a range of failover recovery functions, such as emergency stop, temperature control, and high speed anti-contamination control. Overall, TEL / TOKYO ELECTRON INDY B L is a powerful and precise wet etching tool that is designed for accuracy and safety. Its automated features, precision control, and safety functions make it an ideal choice for surface engineering and photomask abrasion applications.
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