Used TEL / TOKYO ELECTRON Indy-B-L #9394956 for sale

TEL / TOKYO ELECTRON Indy-B-L is a next generation etcher/asher used in semiconductor fabrication processes. It is an industry-leading, low-cost solution that provides exceptional throughput and wafer uniformity, helping to reduce device costs and improve overall profitability. TEL INDY B L etcher/asher utilizes advanced etching technology and proprietary etchant sources to deliver market-leading performance. Its robust design is based on a reliable, single-stage CVD-PVD process, allowing a single tool to perform all the etching, impurities removing, deposition and ion implantation steps, resulting in improved cycle times and greater throughput efficiency. TOKYO ELECTRON INDY B-L is particularly suited for low temperature plasma etching, with fast reaction times, high etch selectivity and uniformity. Employing a variety of source gases, process mix channels, and integrated oven to program different profiles, the tool also enables precision metal etching of SiO2/SiN/Si3N4/SiON films. In addition, its automated wafer handling equipment with 3-dimensional robot arm ensures faster wafer loading and switching, while its advanced data logging system facilitates detailed process monitoring and data collection to support process yield improvement. Indy-B-L etcher/asher is also capable of batch processing, enabling simultaneous process of multiple wafers. It also features a self-disinfection unit which helps eliminate particles to prevent contamination. Furthermore, it is equipped with automatic chuck cleaning technology, allowing greater accuracy and productivity in cleaning cycle times. In conclusion, TOKYO ELECTRON INDY B L is an advanced etching/ashing machine, providing high throughput and process uniformity, efficiency and cost savings, as well as superior wafer uniformity, precision and accuracy.