Used TEL / TOKYO ELECTRON Indy-B-L #9394959 for sale

TEL / TOKYO ELECTRON Indy-B-L is a SI multi-wafer, high throughput, batch processing etcher/asher equipment with a 75 mm maximum wafer size. This high-technology system offers excellent performance in various etching/ashing processes such as MEMS, SOI, stress relief, anisotropic, and copper plating applications. This unit has a dedicated interlock control machine and a PID-controlled RF generator to efficiently manage power and pressure settings during process steps. It is equipped with a HMI (Human-Machine Interface) which allows for adjustment of settings, monitoring of process parameters, and access to relevant process information. TEL INDY B L's RF generator offers precise control of power, pressure, and frequency, allowing for extremely accurate and repeatable etching/ashing processes. This tool also features 100 automated recipes, as well as data logging and alarm settings for each and every process step. TOKYO ELECTRON INDY B-L also has a multi-column design which allows for the loading of multiple wafers into the same tray for increased productivity. This state-of-the-art asset is further equipped with TEL own Spatia Process Automation (SPA) algorithm, which accurately calibrates the model's process parameters for each chamber and wafer. This allows for a more accurate and repeatable process by reducing human intervention in the process control parameters. Furthermore, the SPA algorithm also helps reduce the possibility of human errors and mistakes. Overall, TEL INDY B-L is an advanced multi-wafer etcher/asher equipment that provides extremely accurate, repeatable, and efficient etching/ashing processes. Its integrated HMI, RF generator, interlock control system, and SPA algorithm provide users with all the tools they need to tremendously improve their production processes.