Used TEL / TOKYO ELECTRON Indy-B-L #9395067 for sale
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ID: 9395067
Wafer Size: 12"
Vintage: 2006
Furnace, 12"
Process: D-Poly
Gases: NH3, DCS, (SiGe), C2H4, HF, 20%F2 with N2, TiCl3 Liquid
Power box
2006 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an etcher/asher designed to provide consistent, high-quality results for a wide range of semiconductor processing. It is equipped with a 240 mm Standard Pattern Generator (SPG) 4-stage electroplater, and can be customized with upgrades such as a wafer cooler, modular spray chamber, and robot arm. TEL INDY B L features horizontal gas flow and a combination process of dry and wet etching. This allows users to achieve a higher degree of selectivity in their etching processes, as well as tighter control over the thickness of the layers etched. The equipment also supports a variety of etching gases, providing the capability to etch multiple substrates in a single step. TOKYO ELECTRON INDY B-L also has an Advanced Control Architecture (ACA), which automates all operations in the etching process. This feature ensures high accuracy and repeatability, while shortening processing times. The system provides users with precise control over process parameters and execution. TEL / TOKYO ELECTRON INDY B L utilizes a variety of automated monitoring functions to ensure the highest quality output. These include automatic gas flow control, impedance control, pressure control, and water density control. The unit is also intuitiveso that users can quickly become familiar with its operation. TEL Indy-B-L offers full computer control and data monitoring capabilities. It can store up to 1,000 recipes, and can be programmed to run high-demand etch processes without operators' intervention. The machine also provides users with optimized solutions, including recipe sorting, table batching, lithography search, critical dimension analysis, and standard deviation minimization. Finally, Indy-B-L offers a wide range of safety features, including an automated fire prevention tool, a nitrogen gas-purging asset, and automatic safety-related alerts. These ensure that the model is used correctly and safely. All of these features, coupled with its comprehensive service and maintenance options, make TEL INDY B-L an ideal choice for those looking for reliable and high-quality etching results.
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