Used TEL / TOKYO ELECTRON Indy-B-L #9402684 for sale

TEL / TOKYO ELECTRON Indy-B-L
ID: 9402684
Wafer Size: 12"
Vintage: 2006
Furnace, 12" Process: D-Poly deposition HDD 2006 vintage.
TEL / TOKYO ELECTRON Indy-B-L is an advanced etcher/asher equipment that enables users to quickly etch and asher wafers and flat panel displays. This system uses ultra-high precision imaging technologies to deliver consistent, high quality etching and ashing results. It employs a combination of an advanced stage unit, frequency-stabilized gas flow, scrubber, and other components to ensure that wafers and flat panel displays are fully etched and ashed. TEL INDY B L etcher/asher machine has two chambers, a main chamber and an exhaust chamber. The main chamber is outfitted with a 5-axis scanning stage, and the exhaust chamber features a gas scrubber. This can handle up to 200 mm dia. wafers, and is capable of processing up to 99 steps at a time. This tool utilizes a pressure spectrum control asset, which monitors up to 32 pressure points inside the chamber during the manufacturing process and adjusts for any irregularities. This model also uses frequency-stabilized gas flow to reduce variance of etching and ashing processes. By stabilizing the gas flow, the etcher/asher equipment is able to achieve exceptional uniform etching and ashing results. Additionally, the system is designed to use a GCF (Gas Condensing Flow) unit to reduce damage caused by uneven dry etching. TOKYO ELECTRON INDY B-L etcher/asher machine has several features that make it ideal for processing wafers and flat panel displays. It has adjustable rotation speed, and the tool can support up to 384 drives. Additionally, it has an integrated vacuum asset that ensures that each wafer is evenly exposed to the etching and ashing gases. This allows TEL Indy-B-L to process extremely delicate parts with ease. Overall, TEL INDY B-L etcher/asher model is a powerful and versatile tool for etching and ashing wafers and flat panel displays. This equipment incorporates advanced imaging technology and frequency-stabilized gas flow to enable high-precision results, and its adjustable rotation speed and integrated vacuum system make it well-suited for delicate parts.
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