Used TEL / TOKYO ELECTRON Indy-B-L #9402686 for sale
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ID: 9402686
Wafer Size: 12"
Vintage: 2010
Furnace, 12"
Process: DCS-Nitride deposition
2010 vintage.
TEL / TOKYO ELECTRON Indy-B-L is a high-end etching / ashing equipment designed for semiconductor applications. With a large volume of 10 liters, TEL INDY B L offers the highest throughput in its class. As a result, faster and higher yields can be achieved. TOKYO ELECTRON INDY B-L is powered by a precise control system with a special sample handling algorithm that can control temperature, power, and other parameters to ensure precise etching and ashing of wafers up to 150mm in diameter. TOKYO ELECTRON INDY B L also offers an array of advanced features that maximize its potential. These include a 3-stage dual nozzle design for precise etching and delivery of high-grade gases, as well as an integrated gas containment unit for safety. The gas containment machine includes a gas filter, pressure control valve, and scrubber to ensure safe gas delivery. The tool also features an integrated laser-assisted alignment and height adjustment asset that provides precise wafer etching angle and uniformity. Indy-B-L's built-in software offers automation and control of the etching/ashing process. Its advanced features allow for precise control of gas concentration and Z-Axis pressure during the etching process. Additionally, the software also has tools to monitor and analyze the quality of the etching. This allows users to optimize productivity by analyzing and adjusting parameters to achieve the desired results. TEL / TOKYO ELECTRON INDY B-L boasts a range of remote operation functions that allow users to control the model from any location. This includes remote control of the heating and cooling systems, monitoring of the etching process, and storage of recipes. This allows for a more efficient etching process, as well as increased safety for operators. Overall, INDY B-L is a high-end etching/ashing equipment equipped with advanced features to ensure productive, efficient and safe operation. Its fast processing capabilities and precise etching results make it an ideal choice for semiconductor application needs.
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