Used TEL / TOKYO ELECTRON Indy-B-L #9402687 for sale
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ID: 9402687
Wafer Size: 12"
Vintage: 2007
Furnace, 12"
Process: N₂O, NH₃, SiH₂Cl₂, SiH₄ deposition
PAC Module
2007 vintage.
TEL / TOKYO ELECTRON Indy-B-L is a versatile etching and ashing machine used in industrial settings. It is capable of providing the highest levels of process control and accuracy while also providing increased throughput and excellent results. TEL INDY B L is built on a compact frame that is easy to install in a variety of configurations for process control optimization. It features a highly advanced Quartz/Low-e multi-stage vacuum system to provide excellent control over the process environment. This robust system allows for precise levels of control to ensure consistent and highly repeatable results. TOKYO ELECTRON INDY B-L is powered by a robust Windows based command platform for maximum reliability, flexibility, and control. It features important features such as advanced process step timers, individual burner temperature controls, batch-oriented scheduling controls, and a variety of options to further enhance etch performance. Additional features such as customized plasma and independent spacing monitor (ISM) control also provide users with excellent control over the etch and ashing process. TOKYO ELECTRON INDY B L is supported by powerful windowed-based hardware and software control algorithms that provide repeatable results. It supports a wide variety of process variables and parameters, allowing users to both fine-tune and optimize their etching and ashing process. Additionally, it also utilizes multiple process zones, quartz glassed-wafer staging and advanced operation parameters to ensure consistent and repeatable performance across a wide range of materials and substrates. Indy-B-L is an ideal etching and ashing tool for industrial use, and its intuitive and easy to use command platform, powerful software and advanced process controls makes it an excellent choice for various industrial needs. Its excellent process control performance, consistent and repeatable results provide users with improved efficiency, quality and profitability.
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