Used TEL / TOKYO ELECTRON Indy-B #293591338 for sale

TEL / TOKYO ELECTRON Indy-B is a next-generation production etcher / asher designed to create high-aspect ratio structures and contact holes with great precision and throughput. The machine features a modular design, which allows for different users to customize the machine for their specific needs. TEL Indy-B is equipped with a Toshiba 2.2MeV ion source and a 1.5 m x 1.0 m processing chamber, which together offer excellent throughput rates and etch rates. The etcher / asher also offers 'touch-free' processing, meaning all wafer handling during etching, ashing, and plasma processes is contactless, preventing scratches or other damage to delicate wafers or devices. The machine also employs powerful, feedback-controlled etching and ashing processes, which use real-time advanced matching algorithms to guarantee pinpoint accuracy of the etched and ashed features, even at high throughput levels. In addition to its powerful etching and ashing capabilities, TOKYO ELECTRON Indy-B also offers advanced plasma generation systems, with multiple electron cyclotron resonance (ECR) sources and an array of gas injection optics. This allows for the generation of various plasmas, from ultra-low-flow plasmas for diffusion and CVD steps, to high-density plasmas for etching and ashing. Other features of the plasma system include automatic frequency tuning, real-time gas matching, and a remote plasma generator. With the various features of Indy-B etcher / asher, users can create high-aspect ratio structures, contact holes, and other small devices with great precision and throughput. Furthermore, its modular design and powerful process control systems make it a perfect tool for advanced microfabrication processes.