Used TEL / TOKYO ELECTRON Indy-B #9390672 for sale

TEL / TOKYO ELECTRON Indy-B
ID: 9390672
Vertical diffusion furnace Process: DCS Nit.
TEL / TOKYO ELECTRON Indy-B is an etching and ashing system designed to provide semiconductor manufacturers with high-precision and reliable critical substrate processing. It features an easy-to-learn and user-friendly TEL interface that allows user-defined recipes for different process applications. TEL Indy-B is composed of two main sections, the heater/mapper and the processing components, which are physically connected. The heater/mapper is responsible for accurately heating and mapping wafers, while the processing components perform the etching and ashing processes. TOKYO ELECTRON Indy-B features an optimized high resolution area mapping and full wafer mapping mode. The heater/mapper not only provides users with precise temperature control, it also allows users to monitor their precise resistance and voltage levels. It also supports multiple gases, ensuring efficient gas flow and minimizing the risk of breakage or defects. The processing components of Indy-B support up to five chambers, including two parallel etch and ashers, two single-wafer ashers, and a single-wafer etcher. To ensure that wafers are evenly distributed for processing, TEL / TOKYO ELECTRON Indy-B automatically processes wafers based on a single-wafer or multiple-wafer recipe. TEL Indy-B can operate up to 200 mm in diameter wafers, providing users with a reliable and efficient etching and ashing solution. TOKYO ELECTRON Indy-B also features advanced MEMS testing capabilities, which allow users to quickly and accurately assess the effectiveness of etching procedures on MEMS structures. Additionally, users can use Indy-B's comprehensive application suite to develop, program, and execute recipes for a variety of etch and ashing processes. This ensures that users have the flexibility to develop custom etch and ashing recipes to meet their exact application requirements. TEL / TOKYO ELECTRON Indy-B is a highly advanced etch and ashing solution that offers high-performance and precision in critical substrate processing. Its comprehensive application suite and comprehensive testing capabilities make it the perfect choice for semiconductor manufacturers that require superior etch and ashing results.
There are no reviews yet