Used TEL / TOKYO ELECTRON Indy-I-L #293809896 for sale
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TEL / TOKYO ELECTRON Indy-I-L is an etcher/asher designed for semiconductor device fabrication. It is a reactive ion etcher (RIE), which uses a plasma to etch the device layers with precisely controlled ion energy, ion flux, and ion condition. The etching process is designed to shape the physical features of the device, while avoiding damaging the underlying structure. TEL Indy-I-L is a vertical cluster equipment, capable of etching up to 6 wafers simultaneously. The system is equipped with a precision stage for precise wafer positioning in the etching chamber, as well as an RF generator for high-frequency power control. The unit has the ability to control etching parameters through logic control, providing precise and repeatable etching results. It has an upper electrode and two sets of lower electrodes which direct the plasma in specific directions. The etching process can be tailored to the specific device layers and applications, by changing the etching time and RF power level. TOKYO ELECTRON Indy-I-L machine is designed to provide low-temperature etching and is optimized for etching ultra-thin dies. The tool also includes a fast-response gas purging asset and gas treatments for enhanced etch-selectivity and high-accuracy etch-profiles. The model can etch layers from as thin as 0.05 um, with a high degree of accuracy in depth control and uniformity of etching across the wafer. The etching equipment is enclosed in a stainless steel chamber to ensure operator safety during operation. Process control is handled by a built-in PC for the optimization of etching recipes. In addition, the system includes an automatic wafer loader, a wafer monitor, an ion gauze monitor and a quality assurance sensor. Indy-I-L is designed to provide quick processing with a high throughput, making it suitable for both research and production settings.
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