Used TEL / TOKYO ELECTRON Indy-I-L #293812118 for sale

TEL / TOKYO ELECTRON Indy-I-L etcher/asher is an advanced production tool developed to meet the demanding fabrication requirements of today's wafer-level packaging, MEMS and Opto-electronics industries. It offers superior accuracy and repeatability of etching and ashing processes, ensuring consistently high yields and low costs. The equipment is equipped with advanced capability of precision and high-throughput wafer fabrication, as well as a variety of integrated process modules. The integrated process chamber in TEL Indy-I-L etcher/asher is designed to maintain precise balance from the process gas, enabling superior performance in ashing and etching. Its system provides a high plasma uniformity, fast chip cleaning, high process speed and minimized chamber-to-chamber nonuniformity. The unit is designed with the capability to rapidly switch between recipes, minimizing the processing time and cost associated with in-run process adjustments. Additionally, its multiple-chain technology reduces chamber consumption and delivers greater throughput rates per wafer. The rich array of built-in safety features of TOKYO ELECTRON Indy-I-L etcher/asher include cryogenic detection, high pressure-level alarms, shock detection, high quality heating and cooling, remote OPC and wafer-tracking features. Everything is designed to minimize the effect of dust contamination, preventing costly re-processing. Furthermore, the built-in redundancy features provide a machine-wide failover solution, ensuring continuous productivity with minimal downtime. Indy-I-L etcher/asher is also designed for easy maintenance, with user-friendly interface. The automatic wafer concentration control and lithography tool supports simple operation, along with the integration of advanced tracking techniques that provide dynamic recipe selection, allowing users to quickly swap between recipes. In conclusion, TEL / TOKYO ELECTRON Indy-I-L etcher/asher is an advanced, user-friendly and cost-efficient production tool that offers industry-leading etching and ashing processes, excellent plasma uniformity, high accuracy and repeatability, reduced downtime and easy maintenance. If you're looking for a asset that can provide high yields with consistent results and low costs, TEL Indy-I-L etcher/asher is the perfect choice.