Used TEL / TOKYO ELECTRON Indy-I-L #9394514 for sale

TEL / TOKYO ELECTRON Indy-I-L is an etcher/asher, providing patterning solutions for the fabrication of semiconductor devices. It is a highly efficient, automated Short Pulse Asher (SPA) equipment that uses an electron beam optics to create high dimensional accuracy patterns on semiconductor substrates. It is suited for production of complex devices that require high resolution, such as logic, DRAM, and application specific integrated circuits (ASICs). TEL Indy-I-L is equipped with a variety of sources, beam transport components, and process tools that enable multi-layer exposure in a single system. It has a beam encoding sensor with a static position accuracy of less than 1.5 microns. It also contains an exposure control unit designed to maintain a high degree of uniformity across patterned features. As for the source, it is equipped with a high power 25 kW magnetron capable of delivering laser light of short pulse duration ranging from a few picoseconds to a few microseconds. In addition to the electron beam exposure control machine, TOKYO ELECTRON Indy-I-L features an in-situ gas delivery tool for etching and ashing processes. This asset is composed of a gas supply line, an exhaust model, and a pressure controller that allow fine-tuning of the process performance. Furthermore, it is equipped with two independent integrated dry-etch chambers that enable a variety of processes such as etching, ashing, and deposition of the sidewall passivation layer. Indy-I-L also contains a process control computer and software which can be used to monitor and adjust the equipment parameters. This software allows for variation in the gas and plasma duty cycle, as well as the exposure dose. The computer is also pre-programmed with a variety of recipes that can be used to save and transfer data among different systems on the production line. TEL / TOKYO ELECTRON Indy-I-L is an efficient, reliable etcher/asher that is well suited for all stages of fabrication of semiconductor devices. It has the ability to perform a variety of etching and ashing processes, and is capable of patterning complex geometry with a high level of accuracy. Its user-friendly interface allows for easy operation, and its high-power magnetron and gas delivery system enable superior performance.