Used TEL / TOKYO ELECTRON Indy-I-L #9394962 for sale

TEL / TOKYO ELECTRON Indy-I-L
ID: 9394962
Wafer Size: 12"
Furnace, 12" LT ALD SiN.
TEL / TOKYO ELECTRON Indy-I-L is an etcher/asher that offers a compact and cost-efficient solution for gas and physical etching. It is designed to offer a high level of flexibility and versatility, and is capable of handling a wide range of etching tasks including etching of polymers, dielectrics, metals, and other materials. The machine can process wafers up to 300mm in diameter, making it ideal for small to medium volume manufacturing operations. The primary etching process of TEL Indy-I-L is done using a special gas called chlorine. The machine is configured with two injection nozzles that inject the gas into the etching chamber to create a precise pressure. As a result, uniform etching of the targeted material from all sides of the wafer is achieved. The etching parameters such as pressure, temperature and timing can be precisely adjusted using a PC-based user interface, providing the user with a wide range of etching options. The etching process can also be supplemented using physical etching methods such as abrasive sputtering and laser etching. For example, abrasive sputtering allows for the removal of an organic surface layer from metal surfaces while laser etching allows for precise etching of pits, holes, and circuit patterns. TOKYO ELECTRON Indy-I-L is also equipped with a special a quartz heater that can be used to dry wafers after etching. Indy-I-L is equipped with a variety of safety mechanisms to ensure the safety of operators and equipment in case of unforeseen events such as an ionization event or gas leak. The machine is also equipped with a high-sensitive sensor that detects any changes in etching conditions. If any changes occur, the sensor triggers an automatic shutdown, allowing operators to take appropriate action. All in all, TEL / TOKYO ELECTRON Indy-I-L is an excellent etcher and asher for a wide variety of materials. It offers flexibility and versatility, precise control over etching parameters, and several safety mechanisms - all at a cost-efficient price. TEL Indy-I-L is a reliable and effective choice for small to medium volume manufacturing operations.
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