Used TEL / TOKYO ELECTRON Indy-I-L #9394964 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON Indy-I-L is a medium throughput, multi-platform etcher and asher. It can be used for a wide range of materials, including metals, Si, compounds and dielectrics. Its application includes wafer cleaning, depositings and etching. It is highly versatile and adaptable, allowing users to employ 3-dimensional angled etching and backside ashing. TEL Indy-I-L uses 230mm, 300 mm and 450mm wafer diameters, making it well suited for a variety of applications. It is equipped with three electro-magnetic valve-channel matching actuator (EVMA) assemblies, allowing for high accuracy and speed of processing. A long life plasma source ensures optimal performance for different types of material deposition and etching processes. The built in chamber temperature control equipment allows for a wide range of etching temperatures, providing for precise etching. TOKYO ELECTRON Indy-I-L also includes a high temperature deposition system, which is capable of rapid high temperature processes such as SiGe/Si deposition and high temperature LPCVD. This feature is supported by an electromagnetic pump that helps maintain impressive uniformity. Not only that, the etcher / asher also features a nitrogen cascading unit, which ensures that novacuum-gas insulated and clean chambers are realized. Indy-I-L is also feature rich when it comes to safety. It is equipped with a safety protection function that will purge the chamber before and after any operation, ensuring the highest attainable level of safety. The machine also utilizes a built-in emergency stop button that will stop the machine immediately in case of an emergency. Finally, TEL / TOKYO ELECTRON Indy-I-L is flexible in terms of both operation and maintenance. Its user interface is equipped with a touch panel, graphical menu, and cloud storage functions that allow users to store settings and recipes, making operation and maintenance greatly simplified and easier. Overall, TEL Indy-I-L is an ideal etcher / asher for those who need high precision, large throughput, and versatile etching/ashing processes. It is robust and offers the precision and safety that users need. It is also extremely user-friendly, allowing users to respond quickly to a wide range of etching and ashing applications.