Used TEL / TOKYO ELECTRON Indy-I-L #9402690 for sale

TEL / TOKYO ELECTRON Indy-I-L is an advanced plasma etcher / asher designed and engineered by TEL. This etcher is specifically designed for high-throughput plasma etching of a variety of substrates, including multi-layer semiconductor devices, dielectrics, and metals. TEL Indy-I-L is a fully integrated etcher, with a high-resolution automated alignment equipment, a high-speed sample-carrying robot, and advanced plasma sources for plasma etching of substrates and films. TOKYO ELECTRON Indy-I-L is designed to deliver high etch rate and selectivity across a wide range of films and substrates, allowing the etcher to be utilized for the fabrication of devices with a high degree of accuracy and uniformity. The high-speed sample-carrying robot enables large substrates with different geometries to be processed quickly and accurately, while the automated alignment system ensures that pattern recognition and substrate registration are precise. This unit also has an advanced plasma source, which is capable of delivering a wide range of etching powers and gases, with a high degree of control. Indy-I-L's advanced process control and diagnostics machine allows for real-time monitoring of etching process parameters, including plasma temperature, pressure, power, and gas flow rates. This enables engineers to precisely control etching parameters and immediately adjust parameters if needed to ensure the highest quality etching processes. TEL / TOKYO ELECTRON Indy-I-L is also fully compatible with simulation tools, allowing engineers to test and simulate etching processes prior to actual processing. This ensures that engineers have the necessary data and information to maximize the performance of the etching process. TEL Indy-I-L is an ideal solution for semiconductor manufacturers and research labs that require high-throughput etching processes. Its advanced features, flexibility, and compatibility make TOKYO ELECTRON Indy-I-L an excellent choice for advanced research and device fabrication.