Used TEL / TOKYO ELECTRON Indy Plus-A-M #293622680 for sale

TEL / TOKYO ELECTRON Indy Plus-A-M is a chemical etcher and asher made by TEL Ltd., a manufacturer and global distributor of semiconductor manufacturing equipment. TEL Indy Plus-A-M is designed to provide batch etching and ashing services for various materials including oxide, nitride, metals and polymers. The system offers full wafer-to-wafer process control through an intuitive user interface, utilizing an advanced computer-guided controller and robotics. TOKYO ELECTRON Indy Plus-A-M is equipped with three chambers and six process modules, plus an additional gas distribution panel. The first chamber is the etch chamber, which is used to etch away unwanted material and sharpen features with acids, bases or reactive gases. The second chamber is the ashing chamber, which uses oxygen or nitrogen-based plasma to quickly remove thin layers of material, allowing for faster processing and a more consistent finish. The third chamber is a pump module, which is used to carefully control the flow of chemicals and gases and helps maintain the system's atmosphere and substrate integrity. Indy Plus-A-M's internal computer-guided controller governs temperature and pressure, as well as other operating parameters, for accurate, repeatable, and safe results. The robotic arm provides precise movement and placement of the substrate to be processes, enabling maximum throughput and minimal downtime. The system also offers various recipes, making it suitable for a range of applications. TEL / TOKYO ELECTRON Indy Plus-A-M is capable of processing a variety of substrates including silicon, III-V, polymers, and metals. It is available in mini (375 mm), mid (450 mm), and max (525 mm) versions, and can accommodate wafers up to 5.25 inches in diameter. TEL Indy Plus-A-M also features an adaptive process monitor, which automatically adjusts etching and ashing parameters to eliminate any potential non-uniformities that may occur during processing. TOKYO ELECTRON Indy Plus-A-M is a reliable, versatile etcher and asher, providing tremendous value to customers who need to etch and ash high-density substrates with consistent results. It offers a wide range of processing options, customizable to meet the needs of its customers, and is supported by TOKYO ELECTRON vast network of knowledgeable customer service professionals.