Used TEL / TOKYO ELECTRON Indy Plus-A-M #293637640 for sale

TEL / TOKYO ELECTRON Indy Plus-A-M is a plasma etching and equipment equipment developed by TEL (TOKYO ELECTRON) and is used in semiconductor and MEMS/NANO processing. TEL Indy Plus-A-M is a plasma etch system that enables high-quality etching of extremely narrow and fine geometries while maintaining high-precision and throughput. It is mainly used in semiconductor processing, photomask fabrication, and MEMS/NANO device applications. TOKYO ELECTRON Indy Plus-A-M has a standard 6-inch and 8-inch batch or cluster etch chamber for batch, planar, or isotropic etching. A new version is also available in a larger 12-inch wafer to accommodate larger wafer sizes. The chamber is designed for high productivity with superior uniformity, repeatability, and low particle contamination. Its high-performance process control unit and intelligent design allow for rapid switching from one process to another. The process control machine also enables real-time adjustments to ensure optimal process conditions for different types of materials. Indy Plus-A-M features the premium TEL / TOKYO ELECTRON Etch Module (TEM) controller which offers advanced versatility and control options on-board. It supports a wide range of etching recipes, including planar linear and anisotropic etch recipes. The TEM provides extreme precision over the power, pressure, and matching of etch parameters, while supporting multiple etch recipes and simulation runaways. The TEM handles both Si etch and SiN etch recipes, and the integrated tool offers superior profile control and critical etch reliability. TEL / TOKYO ELECTRON Indy Plus-A-M also has 3D plasma analysis capabilities, allowing the user to monitor etch uniformity and process conditions in real-time. It also has a built-in diagnostics module which allows for rapid monitoring and adjustment of process parameters. The asset also features an Edge Bias Module which optimizes etch results for different types of materials. TEL Indy Plus-A-M also supports end-users with its specialized Software Development Kit (SDK) which allows customization and the development of user-specific applications for device fabrication. This SDK provides the flexibility to integrate user-specified recipes and processes into TEL Etch Module ensuring precision and complete control over the etching process. In conclusion, TOKYO ELECTRON Indy Plus-A-M is an advanced etcher that allows users high-accuracy, repeatability, and throughput while supporting a wide array of etching recipes and process options. With its intuitive operation, integrated process control model, and flexible SDK, Indy Plus-A-M is a must-have tool for many semiconductor and MEMS/NANO fabrication applications.