Used TEL / TOKYO ELECTRON Indy Plus-A-M #293656320 for sale
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ID: 293656320
Wafer Size: 12"
Vintage: 2016
Furnace, 12"
Process: Low-temperature nitride
Maximum operating temperature: 850°C
N2 Load lock
Wafer type: 300 Si semi STD-Notch
(100) Production wafers
(2) Boat type / (2) boat operation (B/S)
Loading area light: White (LED)
O2 Density control N2 LL
N2 Boat shower wafer cooling
ENTEGRIS F300-2005- 17UT1502
Carrier type: FOUP 25 slots
Edge grip W/T type
VMM-56-306C Mid temperature
Top furnace exhaust connection point
Bottom cooling water connection point
FUJIKIN IGS
Tubing bends: Bend (Less than 90°)
IGS Final filter
CKD IGS Regulator
HITACHI Digital
IGS Press transducer: Nagano
HITACHI AS102S-A HCD SCCM
MKS Capacitance manometer
Press monitor
Pump monitor
Main valve: CKD-VEC
Power box top
Vacuum exhaust system, 4"
Piping trap
CKD-VEC Vacuum pressure control
Quartz material: Electric fused
Quartz inner/outer tube material
Internal T/C: Process tube interior wall type
Tube sealing: N2 Purge and O-Ring seal
Manifold heater
Switch valve for manifold cool
QUARTZ Boat material
117-Slots Ladder (8mm pitch)
Two quartz fins are welded at the bottom
Cap heater
QUARTZ Pedestal type
Shutter purge type
Power supply:
3-Phase connection type: Star connection
Single phase connection: Grounded
Single phase voltage: 120 VAC
3-Phase voltage: 480 VAC
2016 vintage.
TEL / TOKYO ELECTRON Indy Plus-A-M is a state-of-the-art 3D Etching/Ashing tool. It features robust design, superior etching and ashing precision and accuracy and has been developed to meet the needs of today's Semiconductor Equipment manufacturers. With TEL Indy Plus-A-M, users can etch and ashing wafers with less process variation and shorter cycle times. TOKYO ELECTRON Indy Plus-A-M is apt for various etching and ashing applications, as well as for advanced doping, layer transfer, annealing processes and thick film etching. The tool is equipped with an LOBOTRON™ (Laser Optical Beam Optical Tron)plus Mechanized Reflector (MR). Using an LOBOTRON™, Indy Plus-A-M is able to perform etching/ashing with decreased laser-focusing errors due to its robust design. Furthermore, thanks to the MR technology, direct processing (e.g. high aspect ratio etching/ashing) is achievable with a low process variability. TEL / TOKYO ELECTRON Indy Plus-A-M offers a wide range of process capabilities, including the ability to process wafers down to 5-µm for ultra high-aspect-ratio processes and up to 9-mm for high-throughput applications. It can also provide users with repeatable and robust etching/ashing on various types of metals, plastic and oxide materials, as well as crystalline/non-amorphous materials. TEL Indy Plus-A-M is designed to reduce manufacturing costs and improve productivity. Its Closed-Loop Control (CLC) feature provides accurate etching/ashing performance for long-term repeatability. It also ensures consistent product quality by providing real-time feedback of the process parameters. In addition, its automated preconditioning functions help to shorten the etch times while maintaining the desired process endpoints. Overall, TOKYO ELECTRON Indy Plus-A-M is an ideal solution for users who require advanced etching and ashing processes with low cost of ownership. The tool's easy-to-use user interface, affordability, and built-in safety features make it the perfect tool for today's semiconductor industry. It is ideal for manufacturers looking to boost their production yield, reduce waste and improve product quality.
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