Used TEL / TOKYO ELECTRON INDY PLUS B M #293643271 for sale

TEL / TOKYO ELECTRON INDY PLUS B M is a medium-scale batch etcher / asher that has been designed to provide comprehensive etching and ashing solutions. This multi-station etcher / asher offers integrated solutions for both physical and chemical etching/ashing processes, allowing users to process up to 6 substrates simultaneously. This enables users to improve throughput, quality and accuracy, being able to deliver consistent results with repeatable performance over time, while reducing downtime. This etcher / asher stands out by offering a wide range of features, such as high-speed reaction acceleration, precise control over etching/ashing conditions, and advanced process monitoring. All of the user-friendly features are available through the intuitive interface of its touch-screen LCD monitor. This user-friendly system allows operators to easily change the run parameters of an etching/ashing process, with step-by-step directions for easy setting and optimization of the etching / ashing recipe. TEL INDY PLUS B-M also offers superior process flexibility, with a varied set of gas sources and gas flows available for different etching/ashing processes. By using the AutostopTM function, the etching / ashing operations can be stopped automatically following the completion of the set process time or when a desired endpoint has been reached. This allows users to maximize their etching / ashing yields without having to manually monitor and adjust their process conditions. In addition, the advanced temperature control system ensures reliable and uniform etching / ashing rates, while minimizing the amount of discarded samples. This etcher / asher has been designed with utmost safety and hygiene in mind. With built-in safety interlocks and advanced sensors, TOKYO ELECTRON INDY PLUS-B-M is able to safely detect any malfunctions in the etching / ashing process, as well as monitor and control chemical leakage and exhaust emissions. Additionally, its closed-loop circulation system minimizes the risk of airborne contamination, and its automatic cleaning cycle ensures a clean and contamination-free workspace. In conclusion, TEL INDY PLUS B M is an excellent choice for medium-scale batch etching and/or ashing processes. This advanced etcher/ asher offers advanced features that allow users to set optimized process parameters for their etching/ashing needs, while its built-in safety features guarantee safe and reliable operations. With its user-friendly interface, flexible process options, and superior safety design, TOKYO ELECTRON INDY PLUS B M is an ideal etching / ashing tool for the most demanding research and industrial applications.