Used TEL / TOKYO ELECTRON INDY PLUS B M #293643274 for sale

TEL / TOKYO ELECTRON INDY PLUS B M is an etcher/asher designed for semiconductor manufacturing processes used in the fabrication of semiconductor devices and components. It is a high-precision etcher/asher capable of a variety of processes such as ion etching, tungsten etching, chemical vapor deposition (CVD), rapid thermal annealing (RTA), and other advanced processes used for device fabrication. The etcher/asher is equipped with a highly reliable dielectric membrane etchers, an electrostatic chuck, and a cooled cooling unit. This combination allows for optimal effectiveness in etching and annealing semiconductor devices and components. TEL INDY PLUS B-M features a large chamber size and high-density etching capability that can process up to 20 wafers per release. The etcher/asher is equipped with a built-in Smart Process Control that automates the process and ensures consistency in production. The Smart Process Control also allows users to monitor the equipment in real-time, making it possible to monitor etching and annealing process parameters. Additionally, TOKYO ELECTRON INDY PLUS-B-M can be used in a variety of temperature ranges, making it suitable for a wide range of applications. INDY PLUS-B-M is designed with a streamlined and intuitive user interface, allowing users to easily navigate the etching and annealing processes. It is also equipped with an advanced diagnostic system that can identify anomalies and diagnose any issues that may arise during the etching or annealing process. The unit is equipped with a database for storing recipes for the etching or annealing process and the ability to store test results for comparison purposes. TOKYO ELECTRON INDY PLUS B-M feature multiple ion sources that are located near the chamber entrance and can be easily inserted for specific etching and annealing applications. The etcher/asher also features an advanced safety machine to ensure the safety of the operators and to prevent any accidents from occurring. In addition, the etcher/asher is also equipped with automatic tool calibration that aligns the inspection and calibration software with the different parameters needed to properly process a wide variety of materials. Overall, INDY PLUS B-M is a reliable, high-precision etcher/asher designed for advanced semiconductor manufacturing processes. It provides a rapid and efficient process for etching, tungsten etching, CVD, RTA, and other advanced processes used for device fabrication. Its large chamber size and high-density etching capability, combined with the built-in Smart Process Control, make it suitable for a wide range of applications. Additionally, the asset is equipped with advanced diagnostics, data storage capability, and automatic model calibration, making it a reliable choice for any semiconductor manufacturing process.