Used TEL / TOKYO ELECTRON INDY PLUS B M #293643277 for sale
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ID: 293643277
Wafer Size: 12"
Vintage: 2007
Furnace, 12"
Process: DCS-MTO
Load lock system
2007 vintage.
TEL / TOKYO ELECTRON INDY PLUS B M Etcher / Asher is a wet bench etcher and asher for back-end-of-line (BEOL) applications, making it ideal for a wide range of manufacturing processes. This advanced tool is built around three independent, automated processes: stripping, etching, and ashing. Stripping is the process used for the initial removal of the corrosive layer from the silicon wafer, an essential step to the wet processing that follows. The tool's high-pressure mode allows for the stripping of up to 9 wafers at once, allowing for faster throughput than other comparable tools. Etching is the next step in the process and also uses high-pressure spray or immersion capabilities to etch dielectric, metal, or both at the same time. It utilizes a two-step process that can be customized to suit a variety of applications. The etch rate is adjustable through programming and can be monitored in real-time. The tool's ASHING process is designed to uniformly etch and remove photoresist coating from the surface of the wafer. The process utilizes CleanScribe Technology, which helps to uniformly remove the photoresist while avoiding damage to the wafer. The addition of a dedicated ETCH/AIR compressor and DI/N2 guards helps to keep the chamber clean, ensuring a reliable, contamination-free process. The tool also has the potential for a variety of upgrades and additions, allowing for further customization based on a manufacturer's specific application. With its three-stage process and customizable configurations, TEL INDY PLUS B-M Etcher / Asher is an ideal choice for a wide range of electronics manufacturing applications. It offers fast, efficient processing and is capable of meeting the exact specifications of any given job. By utilizing the latest in etch/ash technology, this advanced tool is capable of quickly and reliably meeting the most demanding and precise requirements.
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