Used TEL / TOKYO ELECTRON INDY PLUS B M #293649725 for sale

TEL / TOKYO ELECTRON INDY PLUS B M
ID: 293649725
Wafer Size: 12"
Furnace, 12".
TEL / TOKYO ELECTRON INDY PLUS B M is an advanced etching equipment developed by TEL that offers the highest levels of etching accuracy, speed and precision. It is a highly efficient and reliable system that is ideal for semiconductor companies, research institutes and universities seeking to increase throughput and improve accuracy. TEL INDY PLUS B-M can accomplish a wide range of applications, including etching of shallow trenches, fine defects, and isolation regions at the nanometer-scale. TOKYO ELECTRON INDY PLUS-B-M unit features a 3-in-1 combination of an etcher, an asher and a susceptor. Its three core components each feature advanced technologies to ensure optimum performance in all etching and ashing processes. The machine also includes a precision height sensor to ensure accurate etching height as well as a large multi-plate stocker for storing pieces prior to and after etching. TOKYO ELECTRON INDY PLUS B M is equipped with a chemical-mechanical polishing tool for improving surface quality and etching depth, as well as a vacuum tool for ensuring precise gas distribution. Its advanced etcher features excellent accuracy, with a guaranteed precision of 0.5um, while the asher asset is equipped with a high-speed, high-capacity feature to ensure high-speed etching and ashing operations. With a maximum ashing rate of 333 wafers/hr and an accuracy of up to 0.5 μm, this model can cover a wide range of etching needs. INDY PLUS B-M also features a fully automated operation that offers improved access to data and reporting information. This equipment is capable of self-diagnosis to detect any potentially damaging etching processes, allowing for real-time correction and feedback. It is user friendly, allowing operators to easily monitor and control parameters from a centralized console. Furthermore, its advanced software and control systems allow for precise control and flexibility throughout the etching process. Overall, INDY PLUS-B-M is an advanced and reliable etcher, asher and susceptor system that offers state-of-the-art precision and accuracy capabilities. Its versatile and user friendly design make it an ideal choice for many applied etching processes, whether in semiconductor manufacturing operations or research laboratories.
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