Used TEL / TOKYO ELECTRON INDY PLUS B M #293665668 for sale

TEL / TOKYO ELECTRON INDY PLUS B M is an etcher (also known as asher) that is designed for use in manufacturing facilities for Semiconductor IC processing and device fabrication. It is a single-wafer process tool capable of producing both thin-film and thick-film ICs. The device is constructed from stainless steel and features two independent cassette chambers and a wafer transfer chamber. TEL INDY PLUS B-M can process up to 25 wafers simultaneously on one station, delivering excellent throughput and unparalleled energy efficiency. TOKYO ELECTRON INDY PLUS-B-M is equipped with a PLC (Programmable Logic Controller) and a user-friendly touch screen display, providing the operator with full process control. The process and results can be tracked and recorded via the in-built PC. Additionally, the device can be interfaced with an external computer for further processing. TOKYO ELECTRON INDY PLUS B-M is equipped with two independent CFEEC (Chemical Flow Etch Engines & Coaters) units, each containing three side-mounted 20cm pods. The CFEEC units are each capable of up to eight different etch and deposit recipes, plus up to three oxide thin-film annular etch operation options, allowing full control of the etch and deposition rates. Additionally, the device is fully segmented, making it possible to individually control process recipe steps and parameters on a per-wafer basis. TOKYO ELECTRON INDY PLUS B M can be configured to integrate into many advanced process lines and applications. It is fully customizable and offers a wide variety of accessories, enabling it to be used in a wide variety of applications including plasma etching, stripping, pad encapsulation, and metal deposition. It is also capable of delivering consistent etch and deposit rates and extremely high repeatability. Overall, TEL INDY PLUS B M promises to deliver user-friendly operation, precise process control, and efficient operation for applications in semiconductor IC fabrication and device fabrication. It is a compact, powerful device that is sure to be a valuable asset to any production facility.