Used TEL / TOKYO ELECTRON INDY PLUS B M #293670620 for sale

TEL / TOKYO ELECTRON INDY PLUS B M is a high-end etcher/asher with advanced features, ideally suited for industrial and scientific applications. Its features include: A 91 x 52 cm processing chamber, with the option to expand to 119 x 62 cm. A power supply that allows up to 120 watts of power, for etching and ashing processes. Dual pre- and post-heating furnaces that can hold up to 21 wafers. Multiple RF generator outputs that can be individually programmed for specific etching and ashing processes. Microwave ashing capabilities, with optional microwave capability. An advanced pressure system, with the option to monitor in real-time, and accurately control the pressure during etching and ashing processes. Automated cleaning, with the ability to control the pressure, temperature, and flow rate of the cleaning gas. A touch screen user interface that allows users to easily configure their etching and ashing processes, and to monitor the progress of their processes. Multiple sensors that can be used to monitor the status of the processing chamber, including temperature, pressure, and flow rate. An included air scrubber system, which helps to remove particulate contaminants and improve wafer quality. TEL INDY PLUS B-M is designed to offer consistently excellent results, with low maintenance requirements and a long life expectancy. It has also been designed with ease of use in mind, with clear and intuitive user interfaces. Its numerous features make it an ideal choice for industrial and scientific applications, from etching and ashing to advanced process control.