Used TEL / TOKYO ELECTRON INDY PLUS B M #293763487 for sale

ID: 293763487
Wafer Size: 12"
Vintage: 2015
Vertical furnace, 12" Process: Pyro Air valve: CKD VOS-56-101PT Heater Automation system Process chamber MFC, MFM: AERA MAIN / APC: CKD Gases: HCL, H2, O2, N2 Load lock system Storage 4-Color signal tower Carrier transfer Load port: Side FFU FIMS Port Wafer transfer Boat elevator Auto shutter Manufold scavenger (2) Boat transfers Boat stage Manifold Utility box: WAVES Controller GFC Display Operation panel Data I/O Hardware switch Gas unit Cooling unit APC controller Temperature controller Vacuum line Power box: EMO Unit Control board Hardware switch Transformer SCR Unit with controller N2 Purge unit RF Power Rapid cooling unit Pump box Gas subsystem: Gas supply unit Exhaust Vacuum line Operating system: Linux Power supply: 120/480 V, 3 Phase, Single phase 2015 vintage.
TEL / TOKYO ELECTRON INDY PLUS B M is an etcher / asher designed for the high-precision, large-volume production of micro components. This equipment was designed for professional production facilities and is a reliable process control device for mask, plate etching and ashing. It is capable of providing precise and repeatable results for a wide range of wet processing tasks. TEL INDY PLUS B-M operates using a multi-chamber etching cell with a plasma generator contained within one chamber, and the wafer to be etched contained in the other. This allows for the process to take place simultaneously, and ensures a high degree of control over the process parameters. TOKYO ELECTRON INDY PLUS-B-M has an array of safety features that protect against process damage caused by things such as door opening, over-temperature and pressure, as well as other electronic incidents. Additionally, the system is certified to meet IEC 61010-1 standards to ensure reliable operation in any laboratory environment. Furthermore, the unit is highly efficient, with a 95% process repeatability rate. As a result, the machine is well-suited for high-throughput production processes, and produces highly accurate results for multiple types of etching processes, as well as for ashing. In addition to its high-quality results, INDY PLUS B M is designed to provide a number of convenient features. For example, it features a configurable graphical user interface (GUI) which allows for programming of the parameters for an automated etching process, as well as for easy viewing of the process status. Furthermore, its interface can be linked to a variety of other systems such as EDX, Rhythmlogics, and more. This allows for integration with in-house as well as third-party systems, providing great flexibility. The tool also includes a unique design which allows for the introduction of new process step parameters, such as voltage, pressure, and temperature. Overall, TEL / TOKYO ELECTRON INDY PLUS-B-M is an ideal etcher / asher for professional production facilities that need to create high-precision, large-volume micro components. It offers reliable process control, a high degree of repeatability, and the ability to link to a variety of other systems. Furthermore, it offers convenient features such as configurable graphical user interfaces and the ability to introduce new process step parameters, providing great flexibility and making it one of the most versatile systems of its kind.
There are no reviews yet