Used TEL / TOKYO ELECTRON INDY PLUS B M #293763487 for sale
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ID: 293763487
Wafer Size: 12"
Vintage: 2015
Vertical furnace, 12"
Process: Pyro
Air valve: CKD
VOS-56-101PT Heater
Automation system
Process chamber
MFC, MFM: AERA
MAIN / APC: CKD
Gases: HCL, H2, O2, N2
Load lock system
Storage
4-Color signal tower
Carrier transfer
Load port: Side FFU
FIMS Port
Wafer transfer
Boat elevator
Auto shutter
Manufold scavenger
(2) Boat transfers
Boat stage
Manifold
Utility box:
WAVES Controller
GFC Display
Operation panel
Data I/O
Hardware switch
Gas unit
Cooling unit
APC controller
Temperature controller
Vacuum line
Power box:
EMO Unit
Control board
Hardware switch
Transformer
SCR Unit with controller
N2 Purge unit
RF Power
Rapid cooling unit
Pump box
Gas subsystem:
Gas supply unit
Exhaust
Vacuum line
Operating system: Linux
Power supply: 120/480 V, 3 Phase, Single phase
2015 vintage.
TEL / TOKYO ELECTRON INDY PLUS B M is an etcher / asher designed for the high-precision, large-volume production of micro components. This equipment was designed for professional production facilities and is a reliable process control device for mask, plate etching and ashing. It is capable of providing precise and repeatable results for a wide range of wet processing tasks. TEL INDY PLUS B-M operates using a multi-chamber etching cell with a plasma generator contained within one chamber, and the wafer to be etched contained in the other. This allows for the process to take place simultaneously, and ensures a high degree of control over the process parameters. TOKYO ELECTRON INDY PLUS-B-M has an array of safety features that protect against process damage caused by things such as door opening, over-temperature and pressure, as well as other electronic incidents. Additionally, the system is certified to meet IEC 61010-1 standards to ensure reliable operation in any laboratory environment. Furthermore, the unit is highly efficient, with a 95% process repeatability rate. As a result, the machine is well-suited for high-throughput production processes, and produces highly accurate results for multiple types of etching processes, as well as for ashing. In addition to its high-quality results, INDY PLUS B M is designed to provide a number of convenient features. For example, it features a configurable graphical user interface (GUI) which allows for programming of the parameters for an automated etching process, as well as for easy viewing of the process status. Furthermore, its interface can be linked to a variety of other systems such as EDX, Rhythmlogics, and more. This allows for integration with in-house as well as third-party systems, providing great flexibility. The tool also includes a unique design which allows for the introduction of new process step parameters, such as voltage, pressure, and temperature. Overall, TEL / TOKYO ELECTRON INDY PLUS-B-M is an ideal etcher / asher for professional production facilities that need to create high-precision, large-volume micro components. It offers reliable process control, a high degree of repeatability, and the ability to link to a variety of other systems. Furthermore, it offers convenient features such as configurable graphical user interfaces and the ability to introduce new process step parameters, providing great flexibility and making it one of the most versatile systems of its kind.
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