Used TEL / TOKYO ELECTRON INDY PLUS B M #293798907 for sale

TEL / TOKYO ELECTRON INDY PLUS B M is an etcher/asher designed and built by TEL (TOKYO ELECTRON). It is used in semiconductor device fabrication for etching and ashing processes. TEL INDY PLUS B-M offers superior process performance due to its high resolution and superior performance capabilities. The etcher/asher offers a high degree of flexibility in wafer sizes and processes, allowing users to select the appropriate tool for their specific process. The tool utilizes TEL / TOKYO ELECTRON unique high-resolution projection optics, combined with precision motion control, to enable superior and accurate over-etch performance in all process types. TOKYO ELECTRON INDY PLUS-B-M has been designed to meet the demanding requirements of various etching and ashing processes through its machine design and software tools. It can be used for a wide range of etching and ashing applications, including shallow trench isolation (STI), deep reactive-ion etching (DRIE), conductive and insulating etching, directional etching, and plastic etching. TEL INDY PLUS-B-M utilizes TEL custom made component ceramic pin-type loading and unloading cassette, thus providing the user with enhanced wafer loading and unloading. The ceramic pin-type loading and unloading cassette also reduce the downtime associated with wafer preparation. TEL / TOKYO ELECTRON INDY PLUS-B-M has been designed to provide superior performance in etching and ashing process, thanks to its high-resolution projection optics and its ability to precisely control its motion for better over-etch performance. It also features web-based field service capabilities, enabling users to access diagnostic information remotely. With its advanced software tools, users can easily select the appropriate parameters for their process and monitor the system performance effectively. TOKYO ELECTRON INDY PLUS B-M is a safe and reliable system, thanks to its robust design and highly reliable components. It also has the capability to be remotely monitored, so users can quickly and accurately diagnose any problems with the system. In conclusion, TEL / TOKYO ELECTRON INDY PLUS B-M is an advanced etcher/asher offering superior process performance, thanks to its high-resolution optics, precise motion control, and reliable components. It is also capable of remote monitoring and includes web-based field service capabilities.