Used TEL / TOKYO ELECTRON Indy Plus #293587429 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293587429
Vintage: 2010
Furnace 2010 vintage.
TEL / TOKYO ELECTRON Indy Plus is an etcher / asher designed to improve production throughput while maintaining high levels of accuracy and repeatability. The asher utilizes a compact footprint, allowing for easy installation and quick changeover. It is capable of a wide range of etching processes and can be used for a variety of applications including metal traces, PCBs and MEMS. TEL INDYPLUS comes equipped with a dynamic, real-time feedback system and a fast, accurate process window with a reproducible process. The etcher's substages offer both X-Y- and Z-axis motion for precise and repeatable patterning of features with a minimum pattern size of 3µm. The substages have high acceleration, excellent positional accuracy, and smooth and quiet motion. In order to mitigate errors from vacuum pressure due to process environment or electromigration, the etcher has an ultra-precision PID linear actuator that provides stable and accurate performance. Its advanced imaging capabilities allow for quick alignment and enhanced production throughput. TOKYO ELECTRON INDY PLUS is equipped with customizable process recipes, allowing for different etch chemistries. Its intuitive user interface provides easy access to all parameters and recipes, simplifying setup and process control. It also has a built-in Smart Erosive Monitor which real-time monitors, visualizes and records etching process conditions, allowing for highly repeatable etch conditions. The system also has an advanced auto-tune algorithm, which further simplifies recipe setup and adjustment in order to maintain optimal performance locally or across the entire product line. The etcher is able to be utilized in various industrial settings, whether it is a production floor or an R&D facility. The built-in safety features provide users with a safe and secure platform for operation and an automatic shut-off feature in the event of low pressure or power interruptions. TEL Indy Plus is also certified with CE and RoHS regulations. Overall, TEL / TOKYO ELECTRON INDYPLUS has been designed to be a reliable, intuitive, and affordable etcher / asher. It is ideal for a wide range of production applications, providing users with improved production throughput, accurate, repeatable processes, and an overall excellent etching experience.
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