Used TEL / TOKYO ELECTRON Indy Plus #293592996 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher/asher used in the production of semiconductor devices. It is used to etch/ash layers of photoresist material on wafers in order to create various features on the wafers. The process is known as photolithography and is a key step in the fabrication of a semiconductor device. TEL INDYPLUS features a VariBeam™ single-column optical column, providing superior performance and accuracy. The column is capable of precise etching of precise geometries. It offers a high degree of versatility due to its high resolution, ability to etch at higher beam currents, and its integration into the common environments of etch process tools. TOKYO ELECTRON INDY PLUS also has a variety of other features, such as a 25 kV potential isolated bias electrode, a robust system for monitoring, and controlling temperature and atmosphere during etching and ashing. This enables accurate and stable etching and ashing of photoresist layers. TEL / TOKYO ELECTRON INDY PLUS is outfitted with auto-bias calibration and auto-beam current calibration to ensure that the etching and ashing process is of high quality. These features allow the operator to set a target voltage, beam current, and profile, and Indy Plus will automatically adjust to be optimized. Using state-of-the-art computer control, INDYPLUS can also measure and adjust temperature, acidity, and pressure during the etching and ashing process. This ensures that each wafer cycle is reproducible and uniform. TEL Indy Plus etcher/asher is the perfect tool for creating precise geometries with the highest quality. It provides stable operation in a variety of processes, and its features make it a reliable and reliable tool for creating semiconductor devices. TEL is proud to offer INDY PLUS etcher/asher, setting the industry standard for production of quality semiconductor devices.