Used TEL / TOKYO ELECTRON Indy Plus #293596082 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293596082
Furnace Process: ALD High-K.
TEL / TOKYO ELECTRON Indy Plus is an etcher/asher used in the integrated circuit (IC) manufacturing process that creates feature patterns, such as gate electrodes and interconnect wiring, on a substrate by selectively removing the material. It is a tool that serves an important role in achieving precise feature sizes with low edge roughness and precise profile control. TEL INDYPLUS is a wet-etch equipment, which means that it employs an ionic dissolution process. The system can process both organic and inorganic materials, such as silicon, aluminum, boron phosphide and quartz. The unit can also etch multiple layers at once, from the bottom all the way to the top of the substrate, making it a very versatile tool in IC manufacturing. TOKYO ELECTRON INDY PLUS is equipped with state of the art technology, such as advanced process control and a proprietary infra-red feature recognition unit that can detect small features placed on the substrate. The machine is also capable of precise features sizes and shapes thanks to its powerful etching capabilities, as well as its integral multi-jet Ion Beam Implantation and Laser Machines. Indy Plus has a user-friendly control tool, with a 4.3-inch touchscreen panel that enables users to set different process conditions, making it simple and intuitive to use. The asset also includes a high speed data collection unit that can collect process data and provide real-time feedback regarding each etching step as it progresses. In addition, the model is equipped with a range of anti-corrosion measures that protect the equipment from damages caused by entrapped gases and particulate contamination. This includes a comprehensive filtration system that filters particulate and removes impurities from the etching chamber, ensuring clean and precise etching results. TEL / TOKYO ELECTRON INDY PLUS is an important tool for IC manufacturing, and has become increasingly popular due to its accuracy and repeatability. By offering precise feature sizes and shapes with low edge roughness, as well as its advanced process control features, the unit presents an advantageous option for fabricators looking to produce top-quality IC components.
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