Used TEL / TOKYO ELECTRON Indy Plus #293596083 for sale

TEL / TOKYO ELECTRON Indy Plus is a fully automated etcher/asher designed for the fabrication of semiconductor devices. This equipment is a highly reliable, state-of-the-art etch/thermal oxide tool that can be used for the processing of substrates such as quartz, silicon, and aluminum. TEL INDYPLUS has an intuitive, user-friendly touchscreen control panel to easily monitor internal operations, setting conditions, and troubleshooting. A variety of system alerts and alarms can be set to notify the user of any issues. By utilizing a process-controlled gas distribution unit and a unique in-situ method of sampling precursor concentration within the processing chamber, TOKYO ELECTRON INDY PLUS is able to precisely control both the etching process and gas phase chemistry. TEL Indy Plus is equipped with two processing chambers. The first is the substrate chamber, where the etch rate is controlled by the pressure and temperatures. The second is the thermal oxidizer, where oxidation can be controlled by the temperature and time. TOKYO ELECTRON Indy Plus has a single pocket panel that can hold up to four substrates, allowing for wafer sizes between 2" and 6" in diameter. The machine is capable of operating at temperatures as high as 900°C and as low as -20°C. TEL INDY PLUS has the ability to conduct multiple processes in a single run, including etch cleaning, profiling, and isolated etch for shallow trench isolation (STI) and other high aspect-ratio etches. In addition, a variety of post-etch processes such as diffusion and thermal oxidation can also be conducted. The tool also includes several safety and environmental protection features such as gas exhaust, baffle isolation and thermal shields. Overall, INDYPLUS is a reliable and versatile tool with a range of benefits and features that make it an ideal option for semiconductor fabrication. It has a comprehensive set of parameters and capabilities, making it the perfect choice for conducting a variety of etch processes with great accuracy and repeatability.