Used TEL / TOKYO ELECTRON Indy Plus #293627608 for sale
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ID: 293627608
Wafer Size: 12"
Vintage: 2010
Furnace, 12"
Process: ALDZROX
Reactor: Boat rotation
Furnace:
Loading area light: White (LED)
Wafer / Carrier handling: Fork material-Al2O3 + Peek
Facilities: Furnace exhaust connection poi: Top connection
Cooling water connection point: Bottom connection
Furnace (Exhaust / Box, Gas / Box: Main-Fab)
Power box: Sub-Fab
Gas distribution system:
IGS Type: IGS 1.125" W-seal rail-mount
IGS Maker: FUJIKIN
Tubing bends: Bend (Less than 90°)
IGS Final filter-PALL
IGS Regulator: CKD
IGS MFC: AE / Digital
IGS Press transducer: NAGANO
Gas facilities:
Gas VENT connection point: Bottom connection
Exhaust VENT connection point: Bottom Connection
Gas unit exhaust connection point: Top connection
Process gas exhaust connection: Bottom connection
Exhaust :
Vacuum gage:
Press control: MKS (Hot) Capacitance manometer
Press monitor: MKS (Hot) Capacitance manometer
Pump monitor: MKS (Hot) Capacitance manometer
Main valve-CKD-Hi-speed VEC
Vacuum pressure controller: CKD-VEC
Heater model:
Low temperature VMM-56-201 4 Zone/150-600C
Without RCU
Interface specification, Factory automation system:
Carrier ID reader writer type: RF
CIDRW Lower load port: Read
Interface:
Signal tower model: LOUGWB-24-4
Tower as follows: LOUGWB-24-4
(2) LOUGWB-24-3, Default = 1
Signal tower colors: Red / Yellow / Green / Blue
Tower as follows: Red / Yellow / Green / Blue
(2) Red / Yellow / Green
Signal tower: Front
Front operation panel
MMI and gas flowchart: Gas box and front operation panel
Indicator type: Superset
Operator switch: Operator access / Orange (Standard)
Pressure display unit: MPa / Torr
Cabinet exhaust pressure display: Pa
No auto shutter
Does not include Hard Disk Drive (HDD)
2010 vintage.
TEL / TOKYO ELECTRON Indy Plus is a powerful etcher / asher that is used in the semiconductor industry for processing wafers of various sizes. This asher is equipped with state-of-the-art touch panel and energy-saving design that reduce electrical costs and support for quick heating & cooling. It also has multiple recipes stored in memory. TEL INDYPLUS is capable of 400mm and 300mm wafer processing with sizes ranging from 2 to 8 inch. It offers a wide range of processing options including Cl2-based high density ion beam etch, ash, etch and ash, polysilicon film etch and thin film deposition. TOKYO ELECTRON INDY PLUS also features a hybrid type electrostatic chuck that provides improved substrate ashing uniformity and is designed to optimize etching and ashing efficiency. Its robotic arm enables quick wafer transfer. It is equipped with an infrared heating control system that is designed to reduce variation by maintaining the temperature in the processing chamber. TEL / TOKYO ELECTRON INDYPLUS uses a special digital film thickness controller that gives precise repeatability and improved etching/ashing profiles. It also has various safety features including an in chamber return gas monitor, overpressure safety valve, and safety interlocks. In addition to these features, INDYPLUS also has a dedicated sampling chamber for advanced wet bench processing. This provides a clean environment for testing and measuring the properties of high probes and control. INDY PLUS is an entry-level, cost effective but powerful etching solution that fulfills a wide range of fabrication needs in the semiconductor industry. It is user friendly, offers high throughput and precise results and is ideal for high volume processing of different types of wafers.
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