Used TEL / TOKYO ELECTRON Indy Plus #293640263 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher designed for advanced semiconductor processing. It is an upgrade to the standard TEL Indy model and is composed of a precision vacuum chamber, process stations, and automated process controllers. This etcher / asher facilitates dry etching processes used in the fabrication of semiconductor devices. TEL INDYPLUS is utilized in lithography, photoresist ashing, dry etching, ion implantation, and ion beam surface processing. It is capable of working with gases and mixtures used in these operations and offers high-speed, high-precision global alignment for resolving submicron patterns. This etcher / asher uses advanced processes to uniformly etch multiple areas with high-quality surfaces. It features a high-speed global alignment microscope, 200 nm stage movement accuracy, and drift compensation features. TOKYO ELECTRON INDY PLUS also provides superior repeatability for etching processes and improved throughput for parallel etching. The chamber of TEL / TOKYO ELECTRON INDYPLUS is capable of achieving a base pressure of 10mTorr or less and offers a shorter evacuation time when compared to the standard Indy etcher or other etcher / asher models. The chamber is equipped with an AC induction magnetron sputtering device and thermally-assisted CVD metal deposition device. TOKYO ELECTRON Indy Plus can accommodate up to 300mm wafers and a clean environment is maintained through a gas shower equipment with a gas filtration system and a multiple gas delivery unit. This machine ensures that the chamber is free of contamination, thereby improving etching accuracy and throughput. Indy Plus is capable of handling high-aspect ratio etching and can also perform etching up to a few hundred nanometers in thickness. This etcher / asher can process multiple materials at once, making it suitable for a variety of process applications. Furthermore, INDY PLUS is compatible with the full range of IPEC etching chemistries. INDYPLUS is user-friendly and offers an upgradeable design for improvements, making it a cost-effective choice for those looking for a versatile etcher / asher. The etcher / asher is also equipped with safety features to ensure personnel safety and prevent potential accidents.