Used TEL / TOKYO ELECTRON Indy Plus #293649523 for sale

TEL / TOKYO ELECTRON Indy Plus is an advanced etcher/asher designed for applications in the semiconductor manufacturing industry. It is a highly sophisticated equipment with precision beam control capabilities that enable a wide range of etch and ash processes. The system utilizes both direct-axis beam control (DABC) and inverse-axis beam control (IABC) capabilities. It is also equipped with a high-speed imaging unit and a proprietary lithography software. TEL INDYPLUS machine supports both batch and single-wafer operation modes. In batch operation mode, it can accommodate up to 200 wafers in one run. This mode allows users to improve throughput and productivity by performing automated processes without manual loading. The tool also has an advanced leveling capability that ensures uniform etch and ash results. The asset includes a dedicated chamber design called the Uniform High Plasma (UHP) chamber, which controls the etch and ash process by increasing the number of plasma sources and creating a symmetrical plasma pressure profile. This helps reduce the likelihood of uneven etching and ashing, thus improving reproducibility and yield. In addition, TOKYO ELECTRON INDY PLUS model is equipped with a Cleaning to Etch (C2E) capability. This feature enables users to automatically set a sequence of process steps such as cleaning, etching, and ashing to improve efficiency. Indy Plus equipment is also designed for maximum safety. It comes with an alarm system for monitoring the process environment, including temperature and pressure. The unit also has an automatic shut-off function in case of an emergency. Overall, INDYPLUS machine is an advanced, highly efficient etcher/asher designed for semiconductor manufacturing. It offers precision beam control, high-speed imaging, Uniform High Plasma chamber, Cleaning to Etch capability, and an alarm tool for monitoring the process job, making it a reliable and dependable asset for any application.