Used TEL / TOKYO ELECTRON Indy Plus #293649525 for sale

TEL / TOKYO ELECTRON Indy Plus is a semiconductor microelectronics processing equipment which utilizes a highly efficient etching / ashing process. The system is capable of etching / ashing a variety of different materials, including a range of silicon, siloxanes and other various semiconductor materials. This etching / ashing unit is particularly effective when etching and or ashing small feature sizes, which enables the processing of small detectors, transistors and other semiconductor devices. The etching / ashing process consists of several precision-controlled steps. These steps have been designed to obtain a uniformity in the etching process, that is necessary for the generation of reliable and consistent microelectronic devices. The initial process step utilizes a vaporizer, to vaporize the target material with a three-dimensional vaporization pattern. This is followed by a fuel injection machine, which provides additional thermal energy to the deposited material to increase the rate of dissociation. To uniform the process, a high intensity laser beam is then directed onto the substrate to selectively heat the target material at specific sites. Once the heat has been applied, the etched material is then exposed to a plasma environment. This environment causes further dissociation of the material into component molecules. By precisely controlling the conditions within the plasma chamber, the components can be selectively etched away. The etching / ashing process is also capable of removing material in a very controlled manner. This is accomplished by using a high powered sweeping beam tool. The beam is passed in a sequence across the surface of the substrate, which causes the material to be gradually removed. Finally, a combining asset is used to combine the various components of the etching / ashing process. This model includes an automated control panel, which allows individual and complete control of the entire process. The control panel is used to set parameters such as etch time, plasma temperature, pressure and laser power. TEL INDYPLUS is a highly efficient etching / ashing equipment and offers a variety of advanced etching processes for distinct materials. The system is designed to provide efficient and precise etching processes for the production of high quality and reliable microelectronic devices.