Used TEL / TOKYO ELECTRON Indy Plus #293649527 for sale

TEL / TOKYO ELECTRON Indy Plus is a renowned etching/ashing equipment developed by TEL (TOKYO ELECTRON), a leading global supplier of advanced semiconductor production equipment. This state-of-the-art system is designed to precisely pattern, etch and micronize a wide range of frequently-used semiconductor materials through plasma-activated chemical species. These include polysilicon, polyimides, silicon nitride, nitride etch and poly-doped silicon. TEL INDYPLUS etching/ashing process includes two steps: pre-etch and post-etch. The pre-etch process uses an inductively coupled plasma (ICP) source to generate the necessary ions for etching configuration of the semiconductor materials. This stage delivers uniform, high-quality etching to all the target surfaces of the substrate. For the post-etch process, TOKYO ELECTRON INDY PLUS unit features an impressive Digitally Enhanced Derive Anisotropy (DEDA). This valuable feature provides highly precise etching to the target surfaces of the substrate. This precision etching allows INDYPLUS machine to achieve a resolution rate of up to 5 nanometers. In addition, INDY PLUS employs a perforated-based geometry, which ensures that the gas flow to the etching region is highly uniform. This uniformity guarantees a reproducible etching pattern throughout the entire process. Indy Plus also comes with a high-resolution microscopy tool to inspect the etching patterns. It enables real-time imaging and allows users to monitor the progress of their etching process as well as to check for defects and other imperfections. As an additional safety feature, TEL / TOKYO ELECTRON INDY PLUS asset also includes a shutter detection model which prevents irradiating radiation from passing through the equipment when the shutter is closed. All in all, TOKYO ELECTRON Indy Plus system provides the perfect platform for fabricating microstructures and nanometer-scale features on a wide range of substrates with high repeatability and accuracy. Through its advanced technologies and etching capabilities, it offers superior performance and is ideal for a range of applications such as advanced lithography, MEMS devices and integrated circuit development.