Used TEL / TOKYO ELECTRON Indy Plus #293649534 for sale

TEL / TOKYO ELECTRON Indy Plus is an advanced etcher/asher with multiple features designed to deliver precise results. This accurate etching equipment features a 300mm, six-chamber design consistent with the latest technologies, to provide the highest level of repeatability and uniformity. TEL INDYPLUS is equipped with a high-resolution imaging equipment for visualization and precision etching, including a 40 mega pixel digital imaging camera, which can visualize the etching process in a 4k resolution. Five local heating stations evenly distribute the temperature and deliver uniform etching power. The dual stage RF signal produces stable and repeatable bias conditions throughout the etching process. The entire environmental control system, including air handling, is also optimized to provide a stable, pristine etching environment. TOKYO ELECTRON INDY PLUS unit is operated in a fully automated mode, making etching processes easier and more efficient. Every step of an etching recipe is monitored with multiple optical sensors that measure the height, temperature, gas pressure and other parameters. This allows accurate repeatability in step times and etching depths. The machine also boasts a vacuum tool which ensures low thermal diffusion, eliminating any temperature deviations during etching. Indy Plus etcher/asher has been designed to be easy to install and maintain. The advanced software suite includes an intuitive operator interface, user friendly data collection tips, and optional remote access for remote diagnostic functions and troubleshooting. The asset also provides pre-defined procedures for different types of process recipes, making it easier to get started and get the desired results.Thanks to its various features and capabilities, TOKYO ELECTRON INDYPLUS etcher/asher is a must-have machine for achieving precise etching results.