Used TEL / TOKYO ELECTRON Indy Plus #293649535 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293649535
Furnace Hi- vaccum line, 4" Pump capacity: 80000.
TEL / TOKYO ELECTRON Indy Plus is an etcher/asher equipment used for processing advanced substrates for semiconductor and device applications. TEL INDYPLUS is capable of highly accurate patterning processes and utilizes advanced software algorithms to optimize the etching and ashing process throughout the entire process. TOKYO ELECTRON INDY PLUS system is designed to handle a wide range of processes such as high aspect ratio etching, undercut etching, metal-oxide-semiconductor etching and surface smooth etching. It features a large-area deposition source, alongside two sub-sources and two independent DC plasma sources. These dual sources offer higher yields than single-source systems, making it ideal for large-scale production. The software that controls TEL / TOKYO ELECTRON INDY PLUS is designed to ensure complete control and accurate patterning of the substrate during the etching and ashing process. It uses an ActiveX SDK for complete neural network control of the entire etching and ashing process. This allows for dynamic parameter settings based on monitored feedback during the process. Furthermore, INDY PLUS provides an intuitive graphical user interface with an easy to use three step recipe programming user interface. This makes the operation of the unit simple and straightforward for the user. TEL / TOKYO ELECTRON INDYPLUS includes a number of advanced process, safety, and security features to maximize throughput and minimize risk. The onboard safety machine includes independent temperature monitoring of all major process chambers. Additionally, it includes a built-in combustible gas detection tool, low voltage protection, and a low flow detection asset. All these features are designed to ensure that TEL Indy Plus model runs safely and reliably. Additionally, it consists of a secure single-user access equipment, protecting against unauthorized access to the system. Overall, TEL INDY PLUS is a reliable and advanced etching and ashing unit that provides maximum efficiency throughout the entire process. With its integratedSafety and security features, Indy Plus is the ideal choice for production and research applications.
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