Used TEL / TOKYO ELECTRON Indy Plus #293663052 for sale

TEL / TOKYO ELECTRON Indy Plus
ID: 293663052
Furnace.
TEL / TOKYO ELECTRON Indy Plus is a high-performance, low-maintenance etcher / asher ideal for precision metal etching and cleaning. It features a compact design that offers a small footprint, efficient processing time, and a host of advanced features. TEL INDYPLUS sports a 12-inch (300-millimeter) loadlock teardrop-shaped chamber, allowing it to fit easily into most lab and manufacturing setups. It also features TEL proprietary Linear Resonance Magnetic Field (LRMF) technology, which provides a more uniform and precise etch. TOKYO ELECTRON INDY PLUS's high-performance design also allows it to achieve faster processing times with greater accuracy, making it ideal for large production runs. INDY PLUS also offers a variety of advanced features, including low-temperature compatibility, a rotatable source blade holder to ensure a homogenous etch, and advanced gas delivery systems. Its user-friendly graphical user interface (GUI) makes set-up and process monitoring simple and intuitive. Additionally, Indy Plus comes equipped with multi-wavelength optical end-point detection, able to detect target films with a wide range of thickness and thickness variability. Finally, TOKYO ELECTRON INDYPLUS is designed with TOKYO ELECTRON "as found, as left" chamber cleaning methodology, allowing for quick and effortless cleaning, and eliminating the need for separate cleaning personnel. This helps ensure a highly uniform etch and minimizes contamination across large production runs. All in all, TEL INDY PLUS is an advanced and reliable etcher / asher, capable of delivering precise results at high throughputs. Its intuitive interface, low-maintenance design, and advanced features make it well-suited for a variety of applications, from semi-conductor processing to metrology.
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