Used TEL / TOKYO ELECTRON Indy Plus #293670479 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher that brings precision and speed to any processing project. This machine is capable of performing high precision etching processes with accuracy and high throughput. TEL INDYPLUS utilizes a hybrid electrochemical (electroless deposition) technique that enables fast etching with low gas consumption and good selectivity. This etcher / asher is specifically designed for precision etching of a variety of materials, including metals, insulator film, and printed circuit boards. With its micro-molding technology, TOKYO ELECTRON INDY PLUS has the ability to control etching and deposition of high-aspect-ratio feature sizes down to 0.2 μm. This versatile device helps improve process reliability and repeatability. Indy Plus also offers a user-friendly interface that makes setup and programming of the etching process easy. The machine's process options include time and current control program, ADL (automatic deposition limit) control program, and other advanced control functions. TEL / TOKYO ELECTRON INDYPLUS also supports etched layers that are up to 16 µm including arbitrary angle, cross-slit, and stepped etch. INDYPLUS is equipped with a semiconductor front-end module that supports compatibility from 180nm to 65nm technology nodes. The front-end module is used for alkali etching, pre-pattern plasma etch, and post-etch cleaning processes. This feature allows users to optimize DC voltage etching and pulse RF/DC etching processes. TEL Indy Plus includes a chamber outlet system that keeps the chamber clean and pressure under control. This system helps maintain a steady operating temperature and pressure, helping to avoid factors that lead to etching process defects. TEL / TOKYO ELECTRON INDY PLUS also has an advanced vacuum system that optimizes wafer etching uniformity for consistent results. Automated wafer stage tilt and rotation tool-to-tool can also be employed to improve the etching yields. This etcher / asher has superior uniformity, stability, and film characteristics that make it a reliable choice for a variety of etching processes. TOKYO ELECTRON INDYPLUS is easy to install and operate; it's a cost-effective solution and is suitable for production lines or R&D laboratories.