Used TEL / TOKYO ELECTRON Indy Plus #293670480 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher used for semiconductor and MEMS device fabrication. TEL INDYPLUS is an advanced tool designed to etch a variety of materials under tight process control, enabling high-throughput device fabrication. Utilizing an advanced combination of chemical etching and physical etching technologies, TOKYO ELECTRON INDY PLUS provides the best of both worlds, ensuring highly precise results. TEL / TOKYO ELECTRON INDY PLUS has a wide range of features that allow it to be used with a variety of materials. It supports both wet etching and dry etching, and it can etch various materials such as metals, polymers, silicon, aluminum oxides, and dielectrics. This makes it ideal for both classical semiconductor applications as well as MEMS fabrication. TEL Indy Plus is equipped with a wide range of controls and instruments to ensure precise etching results. It is able to control the temperature and power of its plasma chambers precisely, while also maintaining a stable working environment. Additionally, its chamber pressure can easily be adjusted to meet the requirements of different substrates. The tool features a four-axis wafer handling system with a high load capacity that allows for the highest accuracy. It includes a two-dimensional scan pattern capability that can be used to precisely etch complex patterns, such as MEMS structures. Furthermore, it features two electron flood guns for uniform etching across the entire wafer's surface. It has a compact design that minimizes the space requirements of a fab, and its durable construction is designed to stand up to extended use. Additionally, it boasts a low base pressure, allowing it to quickly and accurately etch materials without running the risk of contamination. In addition to its low risk of contamination, Indy Plus also boasts an easy-to-use graphical interface. This allows for more efficient operation, and the interface allows for real-time data and settings monitoring. Additionally, TEL INDY PLUS has the ability to integrate with other equipment in the process line, enabling automated etching. TEL / TOKYO ELECTRON INDYPLUS is an ideal etcher / asher for a wide range of semiconductor and MEMS fabrication applications. With its wide range of features and precise controls, TOKYO ELECTRON INDYPLUS allows for high-throughput device fabrication with the utmost precision.