Used TEL / TOKYO ELECTRON Indy Plus #293670481 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher / asher equipment designed for advanced semiconductor fabrication applications. TEL INDYPLUS is equipped with specialized software, components, and features that allow for extreme precision when etching and ashing features onto a substrate. The first step of etching is the preparation of a substrate. TOKYO ELECTRON INDY PLUS will feature customizable substrate holders, with the ability to place and adjust the correct positioning of the chips before etching. This ensures optimal results with minimal residual toxic powder. Once the substrate is in place, the etch is initially triggered using either the traditional viscous quartz or Inductively Coupled Plasma (ICP) process. During the quartz etch process, the plasma configuration parameters, such as gas pressure, flow rate, and frequency, are adjusted to allow for maximized etch rate. In the ICP process, the pressure, frequency, and shape of the wave are regulated to induce the highest etching rate. TOKYO ELECTRON INDYPLUS is equipped with multiple high-temperature gas injectors to optimize etching conditions. Advanced temperature control of the etching and ashing process is available to allow for fully customized results. To prevent waste, a trap system isolates and treats the exhaust during the etching process, minimizing environmental impact. INDYPLUS\' built-in sensors allow for full control of the etchery by accurately monitoring the etching rate, etching temperature, and substrate characteristics. Real-time data logging is available for all variables, and can be downloaded for later review. After the etching process is complete, the substrates are cleaned with either the dry or wet ashing process. This process determines the quality of the etching, and removes unwanted residue. TEL / TOKYO ELECTRON INDYPLUS offers integrated advanced residue-detection capabilities, and can either allow for the removal of the substrate or further ashing if needed. TOKYO ELECTRON Indy Plus etcher / asher unit is an innovative tool for fabrication and etching of advanced semiconductor devices. With its advanced components and customizable options, INDY PLUS is the perfect etcher / asher machine for any advanced fabrication process.